Project information
Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
- Project Identification
- MSM0021622411
- Project Period
- 1/2005 - 12/2011
- Investor / Pogramme / Project type
-
Ministry of Education, Youth and Sports of the CR
- Research Intents
- MU Faculty or unit
-
Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
- Other MU Faculty/Unit
-
Central European Institute of Technology
- Keywords
- Plasma chemistry, plasma surface treatment, plasma deposition, plasma polymerisation, hard and supra hard coatings,diamond and diamond-like, plasma diagnostics,thin films, spectral plasma sources, low temperature plasma metallurgy, reaction rates of chemi
Study of kinetics of plasmachemical processes by optical, mass-spectrometry and microwave diagnostics. Research and methods of plasmachemical deposition of polymer, superhard, nanocomposite, semipermeable, semisorption and protective thin films. Study of optical, mechanical, chemical and electrical properties of prepared thin films. Study of new types of barrier and surface discharges generated at atmospheric pressure and their applications. New technologies of low-temperature plasma powder metallurgy enabling more economical production of W, WC TiC, WTi and chemical catalysts based on these metals. Proposal and construction of plasmachemical reactors. Study of new methods of plasma diagnostics and monitoring of plasmachemical processes. Computer simulation of discharges and processes running in them. Use of different types of plasma for restoration and conservation of historical artefacts and objects of cultural heritage. Use of pulsed rf and mw plasma for destruction and decomposition of pollutants. Study of selected types of hf and laser generated plasma sources for chemical spectral analysis. Study of perspective volume plasmachemical processes with intention to their practical use. Application of modified hf plasma pencil as a surgery hand operating tool.
This project deals with applied research with large part of basic research. Beside of publications of results new technological patents and industrial samples are expected.
Publications
Total number of publications: 754
2008
-
Influence of N2 and CH4 on deposition rate of boron based thin films prepared by magnetron sputtering
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, year: 2008
-
Influence of N2 and CH4 on depositon rate of boron based thin films prepared by magnetron sputtering
Chemické listy, year: 2008, volume: 102, edition: S4
-
Influence of shadowing on ellipsometric quantities of randomly rough surfaces and thin films
Journal of modern optics, year: 2008, volume: 55, edition: 7
-
Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation
Journal of physics D: Applied physics, year: 2008, volume: 41, edition: 3, DOI
-
Investigation of heavy-metal accumulation in selected plant samples using laser induced breakdown spectroscopy and laser ablation inductively coupled plasma mass spectrometry
Applied Physics A: Materials Science & Processing, year: 2008, volume: 93, edition: 4
-
Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model
Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008, year: 2008
-
Investigation of the coplanar barrier discharge in synthetic air at atmospheric pressure by cross-correlation spectroscopy
Journal of Physics D: Applied Physics, year: 2008, volume: 41, edition: 3
-
Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses
Book of Abstracts, Second Central European Symposium on Plasma Chemistry, year: 2008
-
Iron-based nanoparticles synthesised by microwave plasma
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, year: 2008
-
Kurz laserové ablace
Year: 2008, type: Workshop