Optimization of nanocomposite n-TiC/a-C:H coatings preparation and TEM study of coatings structure after deformation
| Authors | |
|---|---|
| Year of publication | 2012 |
| Type | Article in Proceedings |
| Conference | Potential and Applications of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | nanocomposite PVD mechanical properties TEM FIB |
| Description | This work is aimed on the optimization of preparation of nanocomposite n-TiC/a-C:H coatings. Furthermore the deformation of inner structure was studied using TEM analysis of lamella prepared on a dual-beam microscope using focused ion beam. |
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