INFLUENCE OF Ni DOPING ON PROPERTIES OF Ti-C NANOCOMPOSITE COATING PREPARED BY HYBRID PVD-PECVD PROCESS
| Authors | |
|---|---|
| Year of publication | 2013 |
| Type | Article in Proceedings |
| Conference | PAPN 2013: Book of Extended Abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | titanium carbide; ternary carbides; magnetron sputtering; hard coatings |
| Description | The nc-TiC/a-C(:H) coatings doped by nickel were prepared by hybrid PVD-PECVD process. Ni pellets were placed on titanium target and they were sputtered in mixture of argon and acetylene atmosphere. We found that C2H2 inlet position and the flow rate of acetylene has significant influence on composition of coatings. Mechanical properties were also determined. |
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