Study of the layer deposited on the DCSBD plasma source surface during plasma polymerization process

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Authors	BOGÁR Ondrej KOVÁČIK Dušan ZAHORAN Miroslav ZAHORANOVÁ Anna ČERNÁK Mirko
Year of publication	2013
Type	Article in Proceedings
Conference	Book of Contributed Papers: 19th Symposium on Application of Plasma Processes and Workshop on Plasmas as a Planetary Atmospheres Mimics, Vrátna, 26.-31.1.2013
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Related projects:	CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy