Influence of pulse off time on temporal evolution of sputtered species densities in a HiPIMS discharge
| Authors | |
|---|---|
| Year of publication | 2015 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | Number densities of sputtered Ti atoms and ions in their ground levels were determined by developed technique based on effective branching fractions. Densities were determined for single pulse,sequence of pulses and after the end of the pulse. |
| Related projects: |
|