On the study of the mechanical properties of MoBC coatings
| Authors | |
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| Year of publication | 2015 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | In this study we focused on the comparison of mechanical properties of MoBC thin films with different structures (nanocrystalline or amorphous) and stoichiometry. The thin films were deposited on steel, hard metal and silicon substrates using DC magnetron sputtering. The mechanical properties of MoBC films were studied using indentation techniques under both quasistatic and dynamic conditions using a wide range of loads from 50µN to 1 N. The results showed that even amorphous MoBC thin films had high hardness which is comparable with the common amorphous diamond-like carbon coatings. However, their elastic modulus is significantly higher. The TEM images of the deformed area under the residual indentation imprints showed no cracking even after high loads or after indentation with sharp cube corner indenter. |
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