Spokes and cathode voltage and discharge current oscillations in HiPIMS

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Authors	HNILICA Jaroslav KLEIN Peter HUBIČKA Zdeněk ČADA Martin VAŠINA Petr
Year of publication	2015
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Oscillations were observed on cathode voltage and discharge current temporal evolution of HiPIMS pulse. The frequency of the oscillations depends only on the actual value of the discharge current for given pressure. Rotation of the spokes over the target surface and the frequency of the oscillations on cathode voltage and discharge current show different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges.
Related projects:	CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy