Study of Ni doped nc-TiC/a-C(:H) coatings prepared by hybrid PVD-PECVD process
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| Year of publication | 2015 |
| Type | Conference abstract |
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| Description | Nanocomposite thin films, such as nanocrystalline titanium carbide embedded in an amorphous carbon matrix, nc-TiC/a-C(:H), are widely studied due their mechanical properties such as high hardness [1]. One of the main parameter which determines mechanical properties of nc-TiC/a-C(:H) coating system is the relative content of nanocrystalline and amorphous phases. A possible tool for influencing this parameter is selective doping of this system by a non-carbide forming element such as nickel, proposed by Lewin [2]. Hybrid PVD-PECVD process of sputtering titanium target in mixture of acetylene and argon was used to deposit superhard nc-TiC/a-C(:H) coatings [3]. For nickel doping of these coatings titanium-nickel (92.5 % Ti, 7.5 % Ni) target was used instead of pure titanium one. A sets of nickel free nc-TiC/a-C(:H) and Ni-dopped nc-TiC/a-C(:H) coatings were prepared and compared. For the determination of the influence of nickel doping several different analyses were used. Composition of coatings were determined using EDX technique. Crystallite size and lattice parameter of TiC nanocrystallites was determined by a grazing angle of incidence X-ray diffraction using copper X-ray tube. Coatings were furthermore analyzed by X-ray photoelectron spectroscopy and Raman spectroscopy to qualitatively and also quantitatively determine present bonds. Fischerscope H100 depth sensing indenter equipped with a Berkovich tip was used for evaluation of hardness and Young's modulus of the coatings. This research has been supported by the project CZ.1.05/2.1.00/03.0086 funded by European Regional Development Fund, project LO1411 (NPU I) funded by Ministry of Education, Youth and Sports of Czech Republic and GACR P205/12/0407 project. |
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