Mechanical properties of polymer nanocomposite coatings prepared under dusty plasma conditions
Authors | |
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Year of publication | 2015 |
Type | Article in Proceedings |
Conference | Central European Symposium on Plasma Chemistry (CESPC-6), Bressanone |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | PECVD; hexamethyldisiloxane; mechanical properties; nanoDMA |
Description | The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. The coatings were very elastic, they exhibited high elastic recovery and low plastic. |
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