WIDE-PRESSURE-RANGE COPLANAR DIELECTRIC BARRIER DISCHARGE FOR HYDROCARBON CONTAMINATION REMOVAL IN SCANNING ELECTRON MICROSCOPY
| Authors | |
|---|---|
| Year of publication | 2016 |
| Type | Article in Proceedings |
| Conference | Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistrywith joint COST TD1208 workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment. Book of Contributed Papers |
| MU Faculty or unit | |
| Citation | |
| Web | https://munispace.muni.cz/index.php/munispace/catalog/book/836 |
| Field | Plasma physics |
| Keywords | plasma; discharge; WPR-CDBD; decontamination |
| Description | Unwanted organic contamination of the surface of SEM samples or vacuum chambers often causes reductions of the SEM image quality, e. g. brightness or contrast of image, which worsen over time. This is the reason why the regular cleaning of the surface of the sample or vacuum chamber is necessary. In the presented paper, a novel method for SEM samples organic decontamination based on wide-pressure-range coplanar dielectric barrier discharge was investigated. WPR-CDBD efficiency for various organic compounds’ removal, including heavy hydrocarbons, was proved. Comparison with standard commercial plasma decontaminator XEI working with remote plasma was made. |
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