Effect of nitrogen on sputtered species number densities evolution in reactive HiPIMS
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| Year of publication | 2020 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | Adding a reactive gas into the HiPIMS process opens up a new alley of producing novel materials with a wide range of different compositions. The temporal evolution of the absolute number of the sputtered titanium atoms and ions, the ionized density fraction in the target region and the ion flux in the substrate region in reactive HiPIMS process for different partial pressures of the reactive gas are presented in this contribution. |
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