Soubor dělicích vrstev ve specifikaci s parametry prvního děliče Rp = 50 % ± 3 % @248 nm; druhého děliče Rp = <0,4; 0,75> a Rs < 1 % na vlnové délce 248 nm a zvýšenou propustností v oblasti od 630 nm do 670 nm.
| Title in English | Set of beam splitters coating in specification with parameters of the first beam splitter Rp = 50% ± 3% @248 nm; and second beamsplitter Rp = <0.4; 0.75> and Rs < 1 % at a wavelength of 248 nm and increased transmittance in the region from 630 nm to 670 |
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| Year of publication | 2022 |
| Description | Realization of beam splitters meeting the requirements of reflectivity and transmittance at the working wavelength of 248 nm and the inspection wavelength in the interval <630, 670> nm. The layers of the first beam splitter were prepared by magnetron sputtering technology using a combination of HfO2/SiO2 materials and meet the specification: transmittance for the p-component 50 % ± 3 % at an incidence angle of 45° ± 3° at a wavelength of 248 nm and at the same time reflectivity for the s-component 50 % ± 5 % at an incidence angle of 45° ± 3° in wavelengths from 630 nm to 670 nm. The coating of the second divider was provide by magnetron sputtering technology with a combination of Al2O3/SiO2 materials and meet the specification of an average transmittance higher than 98.5 %, a reflectance for the p-component ranging from 0.4% to 0.75% and a reflectance for the s-component less than 1 % at an angle of incidence of 45° ± 3° at a wavelength of 248 nm and at the same time a reflectance for the s-component of 25 % ± 5 % at an angle of incidence of 45° ± 3° in wavelengths of 630 nm to 670 nm. |
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