Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	BURŠÍKOVÁ Vilma NAVRÁTIL Vladislav ZAJÍČKOVÁ Lenka JANČA Jan
Year of publication	2002
Type	Article in Periodical
Magazine / Source	Materials Science and Engineering A
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Temperature dependence; mechanical properties; DLC; PECVD
Description	The mechanical properties of hard protective DLC/Si films deposited by PECVD from Ar-CH4-HMDSO mixture have been analyzed using microindentation techniques as the main characterisation tool. The formation and development of crack lines and patterns have been studied to determine fracture toughness of the film and of the interface as a function of temperature.
Related projects:	Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates