Mode Transition in Low-pressure RF Capacitive Discharge in Nitrogen

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Authors	DVOŘÁK Pavel ZAJÍČKOVÁ Lenka
Year of publication	2002
Type	Article in Proceedings
Conference	Europhysics Conference Abstracts 26B
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	discharge modes plasma nitrogen
Description	Two different plasma modes of capacitive coupled rf discharge in pure nitrogen were studied. the modes differed significantly in a visual appearance, plasma potential and in the shape of the electron energy distribution function. For the plasma diagnostics we used Langmuir probe, Plasma Process Monitor, optical emission spectroscopy and we carried out electrical measurements on reactor with the discharge.
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