Optical characterization of ZnSe thin films

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Authors	FRANTA Daniel OHLÍDAL Ivan KLAPETEK Petr MONTAIGNE-RAMIL Alberto BONANNI Alberta STIFTER David SITTER Helmut
Year of publication	2003
Type	Article in Proceedings
Conference	19th Congress of the International Commission for Optics: Optics for the Quality of Life
MU Faculty or unit	Faculty of Science
Citation
Web	http://hydra.physics.muni.cz/~franta/bib/SPIE4829_831.html
Field	Solid matter physics and magnetism
Keywords	ZnSe; Optical constants; Ellipsometry
Description	In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses.
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates