Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

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Authors	OHLÍDAL Ivan OHLÍDAL Miloslav KLAPETEK Petr ČUDEK Vladimír JÁKL Miloš
Year of publication	2003
Type	Article in Periodical
Magazine / Source	Proceedings of SPIE
MU Faculty or unit	Faculty of Science
Citation
Field	Optics, masers and lasers
Keywords	fims nonuniform in optical parameters; optical characterization
Description	In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters.
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