Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films

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Authors

OHLÍDAL Ivan FRANTA Daniel FRUMAR Miroslav JEDELSKÝ Jaroslav OMASTA Jaroslav

Year of publication 2004
Type Article in Periodical
Magazine / Source Journal of Optoelectronics and Advanced Materials
MU Faculty or unit

Faculty of Science

Citation
Web http://hydra.physics.muni.cz/~franta/bib/JOAM6_139.html
Field Solid matter physics and magnetism
Keywords As-S chalcogenide films; Ellipsometry; Combined spectrophotometric method; Amorphous materials; Optical constants
Description In this paper the influence of the technological conditions, i.e. As concentration, UV iradiation and anealing, on the optical constants, thickness and material parameters of chalcogenide As-S thin films is studied. For determining the values of the parameters mentioned the optical method based on interpreting experimental data consiting of spectral dependences of the transmittance measured at normal incidence and spectral dependences of the ellipsometric quantities measured for several incidence angles is used. Within the interpretation of the experimental data the Jellison-Modine dispersion model is employed. It is shown that this dispersion model is not suitable for interpreting the spectral dependences of the transmittance of the films studied. Moreover, within the interpretation of the experimental data the physical model containing on isotropic inhomogeneous layer covered with a non-absorbing overlayer is employed for representing the films under investigation.
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