Deposition of teflon like coatings in surface barrier discharge
| Authors | |
|---|---|
| Year of publication | 2004 |
| Type | Article in Periodical |
| Magazine / Source | Czech. J. Phys. |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | deoisition; surface barrier discharge; teflon-like |
| Description | The technique for deposition of thin films with desired surface energy, permeability and wear resistance an pulp board surface by means of barrier surface discharge at atmospheric pressure was developed. The films were deposited from the different mixtures of tetrafluorethylene with nitrogen. |
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