Spatial Distribution of Species in an IPVD reactor

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Authors	BUBLAN Martin VAŠINA Petr DE POUCQUES Ludovic BOISSE-LAPORTE Caroline IMBERT Jean-Christophe TOUZEAU Michel
Year of publication	2003
Type	Article in Proceedings
Conference	WDS 03 Proceeding of Contributed Papers
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	optical emission spectroscopy; optical absorption spectroscopy; IPVD; magnetron
Description	Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too.
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates