Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance

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Authors

KÖHLER B. SCHREIBER J. BENDJUS B. HERMS M. MELOV V. HELFEN L. MIKULÍK Petr BAUMBACH T.

Year of publication 2004
Type Article in Periodical
Magazine / Source Proceedings of SPIE: Testing, Reliability, and Application of Micro- and Nano-Material Systems II
MU Faculty or unit

Faculty of Science

Citation
Web http://www.sci.muni.cz/~mikulik/Publications.html#KohlerSchreiberBendjus-SPIE-2004
Field Solid matter physics and magnetism
Keywords NDE; NDT; materials; X-ray; SEM; SEAM; SPM
Description NDE activities at the Laboratory for Acoustic Diagnosis and Quality Assurance (EADQ) Dresden are outlined. The applied methods comprise acoustic, thermal, optical and X-ray ones. Additionally, scanning probe methods (SPM) and scanning electron microscopy (SEM) are used. Combinations of different methods are especially effective. This is demonstrated for the coupling of an acoustic approach with SEM. For NDE on a micro- and nano-meter scale, preparation of appropriate test flaws and the verification of the NDE results turn out to be a challenge. To meet this challenge, we propose an approach based on focused ion beam technique.
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