Mechanické vlastnosti plazmově deponovaných tenkých vrstev na různých substrátech

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Title in English	Mechanical properties of PCVD thin solid films on various substrates
Authors	BURŠÍKOVÁ Vilma SOBOTA Jan BURŠÍK Jiří NAVRÁTIL Vladislav
Year of publication	2005
Type	Article in Proceedings
Conference	1. Slovensko - Český seminár "Lokálne mechanické vlastnosti"
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Thin solid films; microhardness; low temperature plasma
Description	Mechanical properties of plasma deposited thin films on different substrates were investigated by mens of Depth Sensing Indentation method. The dependence on various parameters and temperature was studied.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Multiscale approach to relationships between mechanical and microstructural characteristics of materials