Optical emission spectroscopy of surfatron generated plasma in Ar + O2 and N2 + O2 mixtures
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Proceedings |
| Conference | Proceedings of ICPIG XXVII |
| MU Faculty or unit | |
| Citation | |
| Web | http://www.icpig2005.nl |
| Field | Plasma physics |
| Keywords | emission spectroscopy surfatron microwave |
| Description | In this study surfatron-generated plasma in Ar + O2 and N2 + O2 gas mixtures was studied by means of optical emission spectroscopy. The surfatron powered by a microwave magnetron generator working at frequency 2.45 GHz in the output power range 0 300 W created plasma from the flowing gas in a quartz tube. The total gas flow rate was kept constant at 600 sccm but the ratio of individual gas flows was varied. Paper discusses results of optical emission spectroscopy: axial variations of radiation of various neutral species in the plasma as well as axial development of rotational and vibrational temperature determined from OH and N2 emission. |
| Related projects: |
|