Scanning electron microscopy of carbon micro- and nanostructures prepared in microwave discharges
Authors | |
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Year of publication | 2005 |
Type | Article in Proceedings |
Conference | Proceedings of 7th Multinational Congress on Microscopy |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | scanning electron microscopy; carbon microstructures; carbon nanostructures; microwave discharge |
Description | Two different carbon structures, carbon nanotubes (CNTs) and crystalline diamond films, were studied by a high resolution scanning electron microscope (SEM). Both forms of carbon were prepared by plasma enhanced chemical vapor deposition (PECVD) in microwave discharges.SEM observation of nanotubes were made by the high performance field emission SEM using SEI mode electron images. No charging effects were observed. |
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