Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions

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Authors	FRANTA Daniel OHLÍDAL Ivan MISTÍK Jan YAMAGUCHI Tomuo HU Gu Jin DAI Ning
Year of publication	2005
Type	Article in Periodical
Magazine / Source	Applied Surface Science
MU Faculty or unit	Faculty of Science
Citation
Web	http://hydra.physics.muni.cz/~franta/bib/ASS244_338.html
Field	Solid matter physics and magnetism
Keywords	PZT films; Optical constants; Ellipsometry; Reflectometry
Description	In this paper the results concerning the optical characterization of the PZT film are presented. The multi-sample modification of the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used to obtain the spectral dependences of the optical constants of this film within the spectral region 190-1000 nm. Within the near-UV region the sharp features of the spectral dependences of the optical constants are found. These features are explained by the existence of the narrow bands of the 4d and 3d valence electrons of the transition metals Zr and Ti. Within the optical characterization of the PZT film the defects consisting of boundary roughness and refractive index profile are respected.
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates