Surfatron Plasma Source of Jet Type - Construction and Diagnostics
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Proceedings |
| Conference | WDS '05 Proceedings of Contributed Papers |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | surfatron plasma; plasma jet; |
| Description | A plasma source based on surfatron was developed and subjected to detailed diagnostics with the aim of future technological applications e.g. surface activation, biomedical application, plasma sterilisation etc. The surfatron powered by a microwave magnetron generator working at frequency 2.45 GHz in the output power range 0 - 300 W created plasma from the flowing gas in a quartz tube which is inserted into the surfatron body (resonator cavity). The total gas flow rate was kept constant at 600 sccm but the ratio of individual gas components flow was varied. Mixtures of Ar (carrier gas) and N2 or O2 (reactive gases) are investigated mainly. The paper is focused on plasma diagnostics made by means of probe measurement (single and double probe technique) and optical emission spectroscopy. Basic plasma parameters are discussed as radial, axial, power and pressure dependences. |
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