Influence of methane on the capacitively coupled hydrogen discharge
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Periodical |
| Magazine / Source | Czechoslovak journal of physics |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | hydrogen;methane;discharge |
| Description | In this work the mixture of hydrogen and a small amount (0-1.5 %) of methane was studied. The measurements were carried out in a low-pressure (5 Pa) capacitively coupled radio frequency discharge. Positive ions and neutral particles were detected by Plasma Process Monitor PPM 421 (Balzers). Optical emission spectra of active discharge were measured by spectrometer Triax 550 Jobin-Yvon Spex. The dominating ions in the discharge were H+. Its amount was significantly decreased when a small amount of methane was added. Although we did not observe any neutral particles heavier than the methane, the positive ions with 1-3 carbon atoms were detected. The dominant carbon containing ion was CH5+. Further, the dissociation degree of hydrogen molecules decreased when methane was added into the discharge. |
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