Depozice uhlíkových nanotrubek metodami PECVD
| Title in English | Carbon nanotubes deposition by PECVD |
|---|---|
| Authors | |
| Year of publication | 2006 |
| Type | Article in Periodical |
| Magazine / Source | Zpravodaj české vakuové společnosti |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Carbon nanotubes; catalyst; plasma enchanced chemical vapor deposition |
| Description | Carbon nanotube were discovered in 1991 by S. Iijima. In this experiment the carbon nanotubes(diameter 4-30 nm, lenght up to 1 micrometer) were synthesized in arc discharge between two carbon rods in argon atmosphere(100 Torr). Nanotubes consist of several concentric cylinders formed from graphene layers. Such a structures were named multi-walled carbon nanotubes (MWCNTs). Exceptional properties and high aspect ratio provoked high interest in this new material. The deposition methods of carbon nanotubes today included arc discharge between doped carbon rods, laser ablation of carbon target with catalyst and very popular chemical vapor deposition methods. Nowdays the research of deposition techniques is concentrated on low temparture methods (below 500 C) and the exact control of nanotubes structure and positioning. Carbon nanotubes can be used in large field of industrial applications especially in microelectronics, space exploration, nanocomposites and biotechnology. |
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