Efficient excimer source in rare gases/chlorine mixtures
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Year of publication | 2006 |
Type | Article in Proceedings |
Conference | 7th International Balkan Workshop on Applied Physics - Abstracts |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | Surface Barrier Discharge; Excimer mixtures |
Description | Parameters of efficient source of excimer radiation generated in rare gases/chlorine mixtures are investigated by OES. |
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