In-situ investigations of Si and Ge interdiffusion in Si cascade structures
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Periodical |
| Magazine / Source | Synchrotron Radiation in Natural Sciences |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | x-ray reflectivity; multilayers; interdiffusion; SiGe |
| Description | We focus on investigation of temperature stability of simple strain symmetrized SiGe/Si multilayers designed similarly as the complicated quantum cascade structures with Ge content 30% and 80%. X-ray reflectivity and diffraction reciprocal space maps for all structures have been recorded at room temperature and during several isothermal annealing processes for temperatures ranging from 550 C up to 824 C. |
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