IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SI CASCADE STRUCTURES

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Authors

MEDUŇA Mojmír NOVÁK Jiří HOLÝ Václav FALUB Claudiu BAUER Günther GRÜTZMACHER Detlev

Year of publication 2006
Type Article in Periodical
Magazine / Source Materials Structure in Chemistry, Biology, Physics and Technology
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords x-ray diffraction; interdiffusion; SiGe
Description We have studied series of strain symmetrized multiple quantum well structures grown on Si0.25Ge0.25 and Si0.5Ge0.5 pseudosubstrates. The Ge content in these structures was 30% and 80% with multilayer periods in the range from 6 to 13 nm. X-ray reflectivity and diffraction reciprocal space maps for all structures have been recorded at room temperature and during annealing.
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