Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges

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Authors	BURSIKOVA Vilma PERINA Vratislav SOBOTA Jaroslav GROSSMAN Jan KLAPETEK Petr BURSIK Jiri FRANTA Daniel OHLIDAL Ivan ZAJICKOVA Lenka HAVEL Josef JANCA Jan
Year of publication	2008
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Nanostructured diamond-like carbon coatings with various doping (Si, O, N) were deposited on several different substrate materials (silicon, glass, polycarbonate and steel) in single (13.56 MHz) and dual capacitive r.f. discharges. The aim of the present work was to compare the properties of NDLC films prepared in single and dual-frequency capacitive plasmas (DFCCP). The objective of our study was to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven substrate surfaces and significant lowering of the internal stress in films.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges