Determining the Confidence Interval for the Center and Width of a Structure in Fitting Measured Data by the Regression Line

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Authors

WIMMER Gejza KAROVIČ Karol

Year of publication 2009
Type Article in Proceedings
Conference Measurement 2009, Proceedings of the 7th International Conference on Measurement
MU Faculty or unit

Faculty of Science

Citation
Field Other mechanical engineering
Keywords Confidence interval; measurement uncertainty
Description Derived are the proper confidence intervals (i.e. interval estimators) for width and center of a two dimensional microstructure e.g. a grating line. The suggested method is more proper for determination the microstructure's form.
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