Properties of nanocomposite coatings prepared by hybrid process of metallic target sputtering in argon and acetylene
| Authors | |
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| Year of publication | 2011 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | The contribution reports on properties of nc-TiC/a-C:H coatings consisting of TiC (titanium carbide) crystallites of characteristic size ranging from several to several tens of nm embedded in hydrogenated carbon based matrix. The coatings were prepared by a hybrid deposition process combining PVD (sputtering of metallic target) and PECVD (plasma in mixture of Ar and acetylene) aspects. These coatings are usually prepared at conditions of very high ion bombardment. We have shown that only relatively low ion bombardment is enough to prepare coatings of very good quality (good adhesion, high hardness and Young’s modulus). Moreover, at these conditions, the stress in the coating is very low and coating with high thickness (even 10 micrometers) can be prepared. |
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