INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

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Authors	MURESAN Mihai George ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma FRANTA Daniel NEČAS David PEŘINA Vratislav MIKŠOVÁ Romana
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI).
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