Experimental study of hybrid PVD-PECVD process of titanium target sputtering in argon and acetylene

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Authors	SCHMIDTOVÁ Tereza VAŠINA Petr SOUČEK Pavel
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	This contribution deals with the experimental study of hybrid PVD-PECVD process of titanium sputtering in argon and acetylene.
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