Versatile PECVD process for preparation of iron-based magnetic nanoparticles

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Authors

ZELINA Peter JAŠEK Ondřej KUDRLE Vít DAVID Bohumil PIZÚROVÁ Naděžda

Year of publication 2011
Type Article in Proceedings
Conference Proceedings of ICCE 19
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Plasma synthesis; PECVD; Nanoparticle; Magnetic nanopowder; Iron oxide
Description Using microwave low-pressure discharge, we synthesised magnetic iron-oxide nanopowder from the iron pentacarbonyl precursor. We were able to vary the size and chemical composition (especially the ratio between various iron oxides) by careful control of the process parameters. The nanoparticulate product was analysed by X-ray diffraction (XRD) and Raman spectroscopy. However, the XRD cannot reliably distinguish between the size-broadened peaks of gamma-Fe2O3 (maghemite) and Fe3O4 (magnetite) due to their nearly identical crystalline structure. Hence we used a chemical method to determine the presence of Fe(II) and Fe(III) ions in the nanopowder samples. The results agree with those from the Raman spectroscopy.
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