Langmuir Probe and Optical Emission Diagnostics of DC Cylindrical Magnetron
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| Year of publication | 2012 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | In this paper we present study of the dc discharge in the cylindrical magnetron device. The working gas was neon, the typical working pressure range was of 2-10 Pa and discharge current was set up in the range of 100-250 mA. Measurements were performed in the neon weakly magnetized dc plasma using the radial movable cylindrical Langmuire probe. From probe characteristics, radial dependences of plasma parameters (plasma potential, floating potential, electron density) were obtained. Optical emission spectroscopy accompanied with a method of effective branching fractions (EBF) was used to determine neon 1s3 and 1s5 metastable state densities from transitions 2p5 3p - 2p5 3s. The determined density of 1s5 metastable state was 2.2x10^10 cm-3. |
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