Universal dispersion model for characterization of optical thin films over wide spectral range: Application to magnesium fluoride
| Autoři | |
|---|---|
| Rok publikování | 2017 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | Applied Surface Science |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | https://www.sciencedirect.com/science/article/pii/S016943321632030X |
| Doi | http://dx.doi.org/10.1016/j.apsusc.2016.09.149 |
| Klíčová slova | Optical constants;Ellipsometry;Spectrophotometry;Sum rule |
| Přiložené soubory | |
| Popis | Optical characterization of magnesium fluoride thin films is performed in a wide spectral range from far infrared to extreme ultraviolet (0.01-45 eV) utilizing the universal dispersion model. Two film defects, i.e. random roughness of the upper boundaries and defect transition layer at lower boundary are taken into account. An extension of universal dispersion model consisting in expressing the excitonic contributions as linear combinations of Gaussian and truncated Lorentzian terms is introduced. The spectral dependencies of the optical constants are presented in a graphical form and by the complete set of dispersion parameters that allows generating tabulated optical constants with required range and step using a simple utility in the newAD2 software package. |
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