Numerical enhancements of the microwave resonant cavity method for plasma diagnostics

• Autoři: FALTÝNEK Jan; KUDRLE Vít; TESAŘ Jakub; VOLFOVÁ Martina; TÁLSKÝ Antonín
• Rok publikování: 2019
• Druh: Článek v odborném periodiku
• Časopis / Zdroj: PLASMA SOURCES SCIENCE & TECHNOLOGY
• Fakulta / Pracoviště MU: Přírodovědecká fakulta
• www: https://iopscience.iop.org/article/10.1088/1361-6595/ab4300/meta
• Doi: http://dx.doi.org/10.1088/1361-6595/ab4300
• Klíčová slova: numerical model; resonator; microwave; plasma diagnostics; plasma density; discharge profile; mode stability
• Popis: Microwave resonator method is a well established and sensitive technique of plasma density measurements, especially in low pressure plasmas. The traditional Slater approximation of very small electromagnetic field perturbation is extended and corrected by a more accurate, yet relatively simple numerical model, also addressing further phenomena such as the resonator eigenmodes and the stability of the dominant mode. The presence of a discharge tube is found to be a main source of deviation from the Slater approximation. The pre-calculated numerical correction factors are directly applicable for a range of cavity and discharge tube geometries.

Související projekty

• Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
• Studium procesu nukleace dvourozměrných uhlíkových nanostruktur v mikrovlnném plazmatu