Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target

Varování

Publikace nespadá pod Ústav výpočetní techniky, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.

Autoři	KŘENEK Tomáš MIKYSEK Petr POLA Michal VÁLA Lukáš MELARÉ Estela JANDOVÁ Věra VAVRUŇKOVÁ Veronika RIEGER David
Rok publikování	2019
Druh	Článek ve sborníku
Konference	IOP Conference Series: Materials Science and Engineering
Fakulta / Pracoviště MU	Přírodovědecká fakulta
Citace
www	https://iopscience.iop.org/article/10.1088/1757-899X/613/1/012016
Doi	http://dx.doi.org/10.1088/1757-899X/613/1/012016
Klíčová slova	pulsed laser deposition; zirconium oxides; FTIR spectroscopy; Zr-O films; X-ray diffraction
Popis	There is a growing interest about the possibilities for preparation of various zirconium oxides from scientific as well as application point of view. Laser ablation of solid target consisting of sintered grains of metallic hexagonal Zr3O and monoclinic ZrO2 results in evaporation of Zr, O species (ions, atoms) and subsequent deposition of Zr-O film. Ta and Cu have been used as substrates. The films were analyzed by SEM-EDX, Raman and FTIR spectroscopy and X-ray diffraction. The coat on Cu consists of monoclinic ZrO2, rhombohedric Zr3O, and metastable tetragonal ZrO2 phase.
Související projekty:	CERIT Scientific Cloud Velká infrastruktura CESNET