Dynamics of the titanium ground state atoms and ions in HiPIMS discharge

• Autoři: HNILICA Jaroslav; KLEIN Peter; VAŠINA Petr; SNYDERS Rony; BRITUN Nikolay
• Rok publikování: 2021
• Druh: Konferenční abstrakty
• Fakulta / Pracoviště MU: Přírodovědecká fakulta
• Popis: This contribution reports on plasma diagnostics of HiPIMS discharge by laser-induced fluorescence and atomic absorption spectroscopy. As a result of discharge characterization, the number densities, as well as temporal propagation of the neutral and ionized sputtered titanium atoms were determined. The results obtained in this study can be utilized to control the ionization degree, sputtering rate, as well as the other discharge parameters in industrial deposition processes involving HiPIMS discharges.

Související projekty

• Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev
• R&D centre for plasma and nanotechnology surface modifications