Investigation of spokes in reactive Ar/N2 atmosphere using HiPIMS

Varování

Publikace nespadá pod Ústav výpočetní techniky, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.

Autoři	KLEIN Peter HNILICA Jaroslav ŠLAPANSKÁ Marta KROKER Michael VAŠINA Petr
Rok publikování	2022
Druh	Konferenční abstrakty
Fakulta / Pracoviště MU	Přírodovědecká fakulta
Citace
Popis	Plasma self-organisation into the ionisation zones called spokes rotating in ExB direction is highly researched, however, still not a fully understood phenomenon in the High Power Impulse Magnetron Sputtering (HiPIMS) community. This work presents novel observations of spokes in the Ar/N2 atmosphere where the content of N2 is varied. Spoke spectral emission pattern, rotation velocity, number of spokes and floating potential changes are investigated with respect to changes in N2 content. Clear distinctions between effects of reactive bulk plasma and compound surfaces on spoke appearance are described. Spectral analysis of the spoke structure connects the changes in spoke appearance to changes within the discharge, namely the role of electron energization through Ohmic heating and through sheath energisation of secondary electrons.
Související projekty:	R&D centre for plasma and nanotechnology surface modifications