Project information
Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
- Project Identification
- MSM0021622411
- Project Period
- 1/2005 - 12/2011
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- Research Intents
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
- Other MU Faculty/Unit
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Central European Institute of Technology
- Keywords
- Plasma chemistry, plasma surface treatment, plasma deposition, plasma polymerisation, hard and supra hard coatings,diamond and diamond-like, plasma diagnostics,thin films, spectral plasma sources, low temperature plasma metallurgy, reaction rates of chemi
Study of kinetics of plasmachemical processes by optical, mass-spectrometry and microwave diagnostics. Research and methods of plasmachemical deposition of polymer, superhard, nanocomposite, semipermeable, semisorption and protective thin films. Study of optical, mechanical, chemical and electrical properties of prepared thin films. Study of new types of barrier and surface discharges generated at atmospheric pressure and their applications. New technologies of low-temperature plasma powder metallurgy enabling more economical production of W, WC TiC, WTi and chemical catalysts based on these metals. Proposal and construction of plasmachemical reactors. Study of new methods of plasma diagnostics and monitoring of plasmachemical processes. Computer simulation of discharges and processes running in them. Use of different types of plasma for restoration and conservation of historical artefacts and objects of cultural heritage. Use of pulsed rf and mw plasma for destruction and decomposition of pollutants. Study of selected types of hf and laser generated plasma sources for chemical spectral analysis. Study of perspective volume plasmachemical processes with intention to their practical use. Application of modified hf plasma pencil as a surgery hand operating tool.
This project deals with applied research with large part of basic research. Beside of publications of results new technological patents and industrial samples are expected.
Publications
Total number of publications: 754
2009
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Diagnostics of pulse regime of rf discharge at atmospheric pressure
XVIII-th Symposium on Physics of Switching Arc, year: 2009
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Diffuse Coplanar Surface Barrier Discharge: Properties Under Different Physical Conditions
Year: 2009, type: Appeared in Conference without Proceedings
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Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process
Europhysics Letters, year: 2009, volume: 85, edition: 1
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Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process
Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes, year: 2009
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Higher harmonics of discharge voltage as tool to control accurately state of RF sputtering deposition process
Year: 2009, type: Conference abstract
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Higher harmonics of plasma potential in capacitively coupled discharges
Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts, year: 2009
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Hybrid PVD-PECVD sputtering deposition process - from properties of deposited films to process characteristics
Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8, year: 2009
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Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion
Materials Science and Engineering, year: 2009, volume: 2008, edition: 159-60, DOI
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Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry
Diamond and Related Materials, year: 2009, volume: 18, edition: 2-3, DOI
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Implementation of an autofocus algorithm based on searching the best in-focus image into a table-top laser-induced breakdown spectroscopy setup
Optical Engineering, year: 2009, volume: 48, edition: 10