Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry

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Authors	OHLÍDAL Ivan NEČAS David FRANTA Daniel BURŠÍKOVÁ Vilma
Year of publication	2009
Type	Article in Periodical
Magazine / Source	Diamond and Related Materials
MU Faculty or unit	Faculty of Science
Citation
Web	https://doi.org/10.1016/j.diamond.2008.09.003
Doi	http://dx.doi.org/10.1016/j.diamond.2008.09.003
Field	Plasma physics
Keywords	diamond-like carbon films; thickness non-uniformity; material parameters; optical constants
Description	In practice many films prepared using various technologies exhibit stronger or slighter area non-uniformity. Diamond-like carbon (DLC) films are also prepared with this non-uniformity sometimes. In this contribution will be shown how to take into account the thickness non-uniformity of the films when their optical characterization is carried out using spectrometric ellipsometry. Two new formulas expressing each of the three associated ellipsometric parameters, i.e. three components of the Stokes vector, of the films exhibiting thickness non-uniformity will be presented for phase modulated ellipsometry.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges