Evolution of sputtered species densities in HiPIMS process with acetylene gas

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Authors	BERNÁTOVÁ Katarína FEKETE Matej KLEIN Peter HNILICA Jaroslav VAŠINA Petr
Year of publication	2017
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	We report the effect of increasing the mass flow rate of the acetylene gas on the sputtered Ti atom and ion ground state number densities using the spectroscopic method based on effective branching fractions in HiPIMS and DCMS process.
Related projects:	Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace