Time-resolved sputtered species number density in Ar/N2 HiPIMS

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Authors	BERNÁTOVÁ Katarína KLEIN Peter FEKETE Matej HNILICA Jaroslav VAŠINA Petr
Year of publication	2021
Type	Appeared in Conference without Proceedings
MU Faculty or unit	Faculty of Science
Citation
Description	The online presentation described the temporal evolution of sputtered titanium atoms and titanium ions ground state densities in the target and substrate region, for four different nitrogen gas flow, and for two differently powered pulses.
Related projects:	Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev R&D centre for plasma and nanotechnology surface modifications