Depozice a charakterizace organosilikonových tenkých vrstev ze směsi TEOS+O2

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Title in English	Deposition and characterization of organosilicon thin films from TEOS + O2 gas mixture
Authors	JANČA Jan NAVRÁTIL Karel BOCHNÍČEK Zdeněk PEŘINA V.
Year of publication	1995
Type	Article in Periodical
Magazine / Source	Czechoslovak Journal of Physics
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates