In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	ZHUANG Y. PIETSCH U. STANGL J. HOLÝ Václav DAROWSKI N. GRENZER J. ZERLAUTH S. SCHÄFFLER F. BAUER G.
Year of publication	2000
Type	Article in Periodical
Magazine / Source	Physica B
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
Description	In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
Related projects:	Physical properties of new materials and layered structures