Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study

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Authors	ANOPCHENKO A. JERGEL M. MAJKOVA E. HOLY V.
Year of publication	2001
Type	Article in Periodical
Magazine / Source	Physica B
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Description	Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study
Related projects:	Self-organization processes on the interfaces during epitaxial growth of semiconductor superlattices