Optical diagnostics of atmospheric pressure glow discharge in nitrogen with admixture of organosilicon

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	NAVRÁTIL Zdeněk SŤAHEL Pavel TRUNEC David BURŠÍKOVÁ Vilma BRABLEC Antonín
Year of publication	2003
Type	Article in Proceedings
Conference	Proceedings of ICPIG XXVI
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	atmospheric pressure glow dicharge; spectroscopy; nitrogen; organosilicon
Description	The atmospheric pressure glow discharge in nitrogen with small admixture of different organosilicon compounds such as hexamethyldisilazane and hexamethyldisiloxane was studied by means of emission spectroscopy. The deposited films were studied by means of indentation techniques.
Related projects:	Deposition of thin films and surface modifications in silent and glow discharges at atmospheric pressure Application of surface discharge at atmospheric pressure for the modification of the surfaces and deposition of polymer protective coatings